Riassunto analitico
Zirconium nitride (ZrN) and carbonitride (ZrCN) thin films have been deposited by High Power Impulse Magnetron Sputtering (HiPiMS) on steel specimens. Deposition conditions have been controlled to produce zirconium nitride coatings varying the peak current and zirconium carbonitride coatings changing the acetylene flow.
The coated specimens have been characterized firstly by colorimetric analysis, chemically by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Raman Spectroscopy, Auger Electron Spectroscopy (AES), morphologically by scanning electron microscopy (SEM), mechanically by Scratch test and Nano-Indentation.
Zirconium nitrides and carbonitrides find applications in decorative fields and their deposition processes are mainly Direct Current Magnetron Sputtering (DCMS), Cathodic Arc and HiPiMS. The aim of this study is to correlate coatings microstructure with the colorimetric output to evaluate repeatability and versatility, key parameters in the decorative field.
This study embraces one part of a greater work that involves also DCMS, and cathodic arc deposited ZrN and ZrCN coatings. The objective is to compare aesthetic properties of each deposition method and correlate them to coatings microstructure, highlighting processes influence on chemistry, morphology and colour of deposited films.
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Abstract
Zirconium nitride (ZrN) and carbonitride (ZrCN) thin films have been deposited by High Power Impulse Magnetron Sputtering (HiPiMS) on steel specimens. Deposition conditions have been controlled to produce zirconium nitride coatings varying the peak current and zirconium carbonitride coatings changing the acetylene flow.
The coated specimens have been characterized firstly by colorimetric analysis, chemically by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Raman Spectroscopy, Auger Electron Spectroscopy (AES), morphologically by scanning electron microscopy (SEM), mechanically by Scratch test and Nano-Indentation.
Zirconium nitrides and carbonitrides find applications in decorative fields and their deposition processes are mainly Direct Current Magnetron Sputtering (DCMS), Cathodic Arc and HiPiMS. The aim of this study is to correlate coatings microstructure with the colorimetric output to evaluate repeatability and versatility, key parameters in the decorative field.
This study embraces one part of a greater work that involves also DCMS, and cathodic arc deposited ZrN and ZrCN coatings. The objective is to compare aesthetic properties of each deposition method and correlate them to coatings microstructure, highlighting processes influence on chemistry, morphology and colour of deposited films.
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